The progress in nanocatalyst preparation with atomic layer deposition technology

PEI Yong-li; GUO Chang-jiang; ZHANG Ning; QUAN Yan-hong; REN Jun

doi:10.19906/j.cnki.JFCT.2021068

Volume 49 Issue 9

Sep. 2021

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Article Navigation > Journal of Fuel Chemistry and Technology > 2021 > 49(9): 1281-1293

PEI Yong-li, GUO Chang-jiang, ZHANG Ning, QUAN Yan-hong, REN Jun. The progress in nanocatalyst preparation with atomic layer deposition technology[J]. Journal of Fuel Chemistry and Technology, 2021, 49(9): 1281-1293. doi: 10.19906/j.cnki.JFCT.2021068

Citation:

PEI Yong-li, GUO Chang-jiang, ZHANG Ning, QUAN Yan-hong, REN Jun. The progress in nanocatalyst preparation with atomic layer deposition technology[J]. Journal of Fuel Chemistry and Technology, 2021, 49(9): 1281-1293. doi: 10.19906/j.cnki.JFCT.2021068

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The progress in nanocatalyst preparation with atomic layer deposition technology

doi: 10.19906/j.cnki.JFCT.2021068

PEI Yong-li^{1, 2
,},
GUO Chang-jiang³,
ZHANG Ning^{1, 2},
QUAN Yan-hong^{1, 2
,
,},
REN Jun^{1, 2
,
,}

1.
State Key Laboratory of Clean and Efficient Coal Utilization, Taiyuan University of Technology, Taiyuan 030024, China
2.
Key Laboratory of Coal Science and Technology (Taiyuan University of Technology), Ministry of Education, Taiyuan 030024, China
3.
Shaanxi Dong Xin Yuan Chemical Industry Co., Ltd, Yulin 719400, China

Funds: The project was supported by the National Science Foundation of China (21776194) and the Natual Science Foundation of Shanxi Province of China (201901D211055)

More Information

Corresponding author: Tel: 0351-6018598. E-mail: renjun@tyut.edu.cn
Received Date: 2021-05-07
Rev Recd Date: 2021-07-01

Available Online: 2021-08-16

Publish Date: 2021-09-30

Abstract

Abstract

Nanocatalysis is facing a technological revolution, which puts forward higher requirements for the accurate control of the size distribution and morphology of metal nanoparticles. Atomic layer deposition (ALD) is proposed as solution to this problem because of its character of accurate controlling metal distribution on atomic level. In this review, the development history, deposition mechanism as well as equipment and technology are summarized. Subsequently, the substrate types and microstructure of obtained catalysts are discussed. In particular, the latest progress of the synthesis and application of metal catalysts prepared by ALD are highlighted. Lastly, the challenges and prospects in ALD are illustrated.
- nanocatalysis,
- atomic layer deposition,
- size effect,
- confinement effect,
- multiple complex structure

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References(84)

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